Name:
IEC/TR 63258 Ed. 1.0 en:2021 PDF
Published Date:
03/19/2021
Status:
Active
Publisher:
International Electrotechnical Commission - Technical Report
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
| Edition : | 1.0 |
| File Size : | 1 file , 1.3 MB |
| Note : | This product is unavailable in Russia, Belarus, Ukraine, Canada |
| Number of Pages : | 21 |
| Published : | 03/19/2021 |
